Characterisation of a Highly Symmetrical Miniature Capacitive Triaxial Accelerometer
نویسندگان
چکیده
polyimide (PI) as flexible interconnection layer between the W mass W house and movatile capacitor plate capacitor plates. The sensor structure and its basic operating A A principle, its mathematical mass-spring-damper model and the necessary cleanroom technology are described. The measurement results show a sensitivity of 0.15 V/(m/s2) with a corresponding resolution of 0.01 m/s2, an off-axis sensitivity of < 5 YO, a good linearity in the output voltage for accelerations up to at least 50 m/s2 and a bandwidth of DC 500 Hz.
منابع مشابه
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